Robot Repair
Major Overhaul Products (Equipe / PRI / Brroks)
Overhaul Products
Model
Features
Model
Features
AXM
10X. 20X
Series
-
AXM 10X, 20X Robot
-
Single / Dual Port
-
Major OEM:
KLA TENCOR / GSI
ATM-30X
Series
-
ATM 30X Robot
-
Single / Dual Port
-
Major OEM:
MATSSON
AXM-40X
Series
-
ATM Robot
-
FLIP Arm Non CU
-
Major OEM:
AMAT
WTM511
Series
-
ATM Robot
-
FLIP Arm Non CU
-
FAB wafer transfer robot
-
Major OEM:
AMAT
PRE Aligner
-
PRE10X, 20X, 30X
-
4″ ~12″ Wafer
-
Major OEM:
MATTSON / KLA
TENCOR / GSI
ESC, EDC
Controller
-
Smart Controller
-
3Axis ~8Axis
-
Major OEM:
MATTSON / AMAT
KLA TENCOR