Robot Repair #22019-01-14T22:49:21+00:00

Robot Repair

Major Overhaul Products (Equipe / PRI / Brroks)

Overhaul Products

Model

Features

Model

Features

AXM
10X. 20X
Series

  • AXM 10X, 20X Robot

  • Single / Dual Port

  • Major OEM:
    KLA TENCOR / GSI

ATM-30X
Series

  • ATM 30X Robot

  • Single / Dual Port

  • Major OEM: 
    MATSSON 

AXM-40X
Series

  • ATM Robot

  • FLIP Arm Non CU

  • Major OEM:
    AMAT

WTM511
Series

  • ATM Robot

  • FLIP Arm Non CU

  • FAB wafer transfer robot

  • Major OEM:
    AMAT

PRE Aligner

  • PRE10X, 20X, 30X

  • 4″ ~12″ Wafer

  • Major OEM:
    MATTSON / KLA
    TENCOR / GSI

ESC, EDC
Controller

  • Smart Controller

  • 3Axis ~8Axis

  • Major OEM:
    MATTSON / AMAT
    KLA TENCOR