Modification & Upgrade2019-01-14T22:50:12+00:00

RTP(Mattson / AG)

Modification & Upgrade

Modification & Upgrade Service

  • Robot Cable Upgrade

  • Wafer Detection Sensor Upgrade

  • Auto Back Pressure Control Upgrade

  • O2 Performance Upgrade

  • Pyrometer Cooling Water Flow Interlock

  • Pyrometer Case Temp SVID Monitoring

  • EFEM Pressure SVID Monitoring

  • Blower Pressure SVID Monitoring

  • Vent Line Modification

  • Pyrometer Protection Cover

  • NH3 Sensor Model Change & SVID Monitoring